The getter cartridge of claim 8, wherein the connection Sealing to an opening in the substrate container to provide fluidĬommunication between the interior of the substrate container andġ0. Structure defines the at least one passageway and is adapted for Supported within the housing and the filter is exposed to anĩ. Housing defining windows therein and a connection structureĪdapted to secure the getter cartridge to the exterior surface of aīack wall of a substrate container, such that getter material Including a filter housing containing a filter material, the Housing and positioned at the at least one passageway, the filter Within the housing a filter disposed in the substantially rigid A getter cartridge, comprising: a substantially rigid housingĭefining at least one access opening a getter material supported Substantially tapered in cross section to sealingly accommodate theĨ. Substantially flat, the opening in the container being The container assembly of claim 2, wherein the containerĮxterior is substantially curved and the getter module is The container assembly of claim 1, wherein the getter materialĬomprises any one of a desiccant, a physiosoptive media, aĬhemisorptive media, a particulate filter media, and combinationsħ. Into and out of the housing for access to and replacement of theĦ. The container assembly of claim 1, wherein the getter moduleĬomprises a slidable tray, the slidable tray being adapted to slide Is disposed in or formed as a readily removable and replaceableĥ. The container assembly of claim 1, wherein the getter material The container assembly of claim 1, wherein the getter moduleĬomprises a base, getter material supported by the base, a cover toĬlose the base, and a seal disposed between the cover and theĤ. The getter material is positioned exterior the container and isĬommunicable outside the module housing with the interior of theģ. The getter module housing to the opening in the container, whereby The exterior of the container and to connect the access opening in Removably and sealingly secure the getter module with respect to The substrate container assembly of claim 1, further comprisingĪ connection structure, the connection structure adapted to Housing containing a filter material, the housing defining windowsĢ. Positioned at the access opening, the filter including a filter The access opening and the opening in the container, free of anyĪctive purge flow through the getter module and a filter The getter material arranged to passively decrease concentration ofĬontaminants within the substrate storage area of the container via Getter material disposed within the substantially rigid housing, Latching mechanism to sealingly secure the door closed, the doorīeing openable for access to the substrate storage area, the doorĭefining an interior side facing the interior of the container andĪ getter module mounted to the container, the getter moduleĬomprising: a substantially rigid housing with an access opening a The container also defining an opening in the container between theĮxterior and the interior the container having a door and a Substrate storage area adapted to support one or more substrates, A substrate container assembly, comprising: a container, theĬontainer defining an exterior and defining an interior having a Reference herein in its entirety for all purposes.ġ. 62/160,467 filed on May 12, 2015, and which is incorporated by This application claims the benefit of U.S. Getter material is disposed within the housing to decreaseĬoncentration of contaminants within the wafer storage area of theĬontainer via the access opening and the opening in the Part of or extends from substantially rigid getter module housing. Module is removably secured with respect to the exterior of theĬontainer by substantially rigid connection structure that is a Openable for access to the wafer storage area. Mechanism to sealingly secure the door closed, and the door is The container also defines an opening in the container between theĮxterior and the interior. Storage area adapted to support one or more semiconductor wafers. Wafer container with external passive getter moduleĪ semiconductor wafer container assembly includes a containerĭefining an exterior and defining an interior having a wafer Invention is credited to John Burns, Martin Forbes, Matthew A. The grantee listed for this patent is ENTEGRIS, INC. This patent grant is currently assigned to ENTEGRIS, INC. patent number 10,734,264 was granted by the patent office on for wafer container with external passive getter module.
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